DESCRIPTION:

The Bird 7001A550-1-2220 is a BDS2 inline RF voltage and current sensor designed for use with the Bird Diagnostic System (BDS2). The sensor is installed directly within the RF feedline and provides highly accurate measurements of voltage, current, phase angle, power, and impedance under real operating conditions. Unlike traditional RF power measurement systems positioned before the matching network, the BDS2 sensor can provide insight into RF behaviour closer to the process environment, allowing users to identify subtle variations that can affect process consistency and product quality.

The BDS2 platform is widely used in semiconductor manufacturing, plasma processing, RF research, and advanced industrial RF applications where precise process control and repeatability are critical. The system enables simultaneous monitoring of multiple frequencies, harmonics, and intermodulation products while tracking rapidly changing RF conditions.

Part number 7001A550-1-2220 identifies a QC-connector BDS2 sensor configuration operating within the Bird Diagnostic System architecture. The sensor interfaces with a BDS2 receiver and calibrated data cable to create a complete RF diagnostic measurement solution capable of monitoring complex RF delivery systems and identifying process drift, impedance changes, and RF matching issues.

Technical Specifications

• Model: BDS2 Sensor
• Part Number: 7001A550-1-2220
• Product type: Inline RF voltage and current sensor
• System compatibility: Bird Diagnostic System (BDS2)
• Frequency range: 307 kHz to 500 MHz configuration available for this sensor family
• Measurement parameters:
  • RF voltage
  • RF current
  • Phase angle
  • Delivered power
  • Impedance
• Multi-frequency measurement capability
• Harmonic measurement support
• Intermodulation analysis support
• High-speed pulse tracking
• QC connector configuration
• Designed for in-line RF feedline installation
• Compatible with Bird BDS2 receivers and calibrated data cables

Key Features

• Inline voltage and current measurement
• Real-time RF process monitoring
• Semiconductor process optimization
• Impedance matching analysis
• Harmonic monitoring capability
• Multi-frequency measurement support
• High-speed pulse tracking
• Process drift identification
• Chamber-to-chamber matching support
• RF delivery system troubleshooting
• Advanced RF diagnostics
• High-accuracy metrology performance
• Compatible with Bird BDS2 platform
• Suitable for research and production environments